TiSix as a new embedded material for attenuated phase shift mask

Eitemau Tebyg

• Additional Siconi™ pre-clean for reliable TiSix contacts in advanced imager technologies
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  Cyhoeddwyd: (2019-03-01)
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  Cyhoeddwyd: (2008)
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  Cyhoeddwyd: (2008)
• Proximal Algorithms for Discrete-Level Phase-Shifting Mask Design with Application to Optogenetics
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  Cyhoeddwyd: (2021-10-01)