THE INITIAL-STAGES OF DIAMOND GROWTH - AN ADSORPTION STUDY OF HOT-FILAMENT ACTIVATED METHANE AND HYDROGEN ON SI(100)
The adsorption of hot filament "activated" methane and hydrogen on Si(100) has been probed with Auger electron and thermal desorption spectroscopies. Whilst the molecular forms of these gases do not adsorb, bound hydrocarbon species are formed on the Si surface after flowing methane over a...
| Main Authors: | , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
1993
|