N-TYPE DOPING OF SNO2 THIN-FILMS BY SB ION-IMPLANTATION
The effects of Sb implantation into textured thin films of SnO2 prepared by RF sputtering have been characterised by a range of techniques including secondary ion mass spectrometry (SIMS), X-ray and ultraviolet photoelectron spectroscopies (XPS and UPS), infrared reflectance, X-ray diffraction and c...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1992
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