High performance Si nanowire field-effect-transistors based on a CMOS inverter with tunable threshold voltage.

We successfully fabricated nanowire-based complementary metal-oxide semiconductor (NWCMOS) inverter devices by utilizing n- and p-type Si nanowire field-effect-transistors (NWFETs) via a low-temperature fabrication processing technique. We demonstrate that NWCMOS inverter devices can be operated at...

Полное описание

Библиографические подробности
Главные авторы: Van, N, Lee, J, Sohn, J, Cha, SN, Whang, D, Kim, J, Kang, D
Формат: Journal article
Язык:English
Опубликовано: Royal Society of Chemistry 2014