Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.
We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitiv...
| Hauptverfasser: | , , , , , , , |
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| Format: | Journal article |
| Sprache: | English |
| Veröffentlicht: |
2010
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