Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.
We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitiv...
| المؤلفون الرئيسيون: | , , , , , , , |
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| التنسيق: | Journal article |
| اللغة: | English |
| منشور في: |
2010
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| _version_ | 1826269724213772288 |
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| author | Wang, P Behan, G Takeguchi, M Hashimoto, A Mitsuishi, K Shimojo, M Kirkland, A Nellist, P |
| author_facet | Wang, P Behan, G Takeguchi, M Hashimoto, A Mitsuishi, K Shimojo, M Kirkland, A Nellist, P |
| author_sort | Wang, P |
| collection | OXFORD |
| description | We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function. |
| first_indexed | 2024-03-06T21:29:38Z |
| format | Journal article |
| id | oxford-uuid:4437cec0-8e2d-4c30-b2cc-7bea5b8c23e4 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T21:29:38Z |
| publishDate | 2010 |
| record_format | dspace |
| spelling | oxford-uuid:4437cec0-8e2d-4c30-b2cc-7bea5b8c23e42022-03-26T15:00:27ZNanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:4437cec0-8e2d-4c30-b2cc-7bea5b8c23e4EnglishSymplectic Elements at Oxford2010Wang, PBehan, GTakeguchi, MHashimoto, AMitsuishi, KShimojo, MKirkland, ANellist, PWe demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function. |
| spellingShingle | Wang, P Behan, G Takeguchi, M Hashimoto, A Mitsuishi, K Shimojo, M Kirkland, A Nellist, P Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. |
| title | Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. |
| title_full | Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. |
| title_fullStr | Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. |
| title_full_unstemmed | Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. |
| title_short | Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope. |
| title_sort | nanoscale energy filtered scanning confocal electron microscopy using a double aberration corrected transmission electron microscope |
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