A convenient method for X-ray analysis in TEM that measures mass thickness and composition
We consider a new approach for quantitative analysis in transmission electron microscopy (TEM) that offers the same convenience as single-standard quantitative analysis in scanning electron microscopy (SEM). Instead of a bulk standard, a thin film with known mass thickness is used as a reference. Th...
Main Authors: | , , , , |
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Format: | Conference item |
Published: |
IOP Publishing
2018
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