A convenient method for X-ray analysis in TEM that measures mass thickness and composition

We consider a new approach for quantitative analysis in transmission electron microscopy (TEM) that offers the same convenience as single-standard quantitative analysis in scanning electron microscopy (SEM). Instead of a bulk standard, a thin film with known mass thickness is used as a reference. Th...

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Bibliographic Details
Main Authors: Statham, P, Sagar, J, Holland, J, Pinard, P, Lozano-Perez, S
Format: Conference item
Published: IOP Publishing 2018