Cathodoluminescence assessment of annealed silicon and a novel technique for estimating minority carrier lifetime in silicon

The effect of low-temperature anneals (≤500 °C) on Cz-Si minority carrier lifetime has been investigated using near-band-edge cathodoluminescence (CL). The low-temperature anneals are intended to produce efficient gettering by taking advantage of the increasing supersaturation of impurities as tempe...

Descripción completa

Detalles Bibliográficos
Autores principales: Fraser, K, Falster, R, Wilshaw, P
Formato: Conference item
Publicado: 2009