Near-field phase shift photolithography for high-frequency SAW transducers

Near-field phase shift photolithography for high-frequency SAW transducers

Optical lithography has been widely used in mass production of various electronic devices, mainly because of its high throughput capability. However, the resolution in conventional lithography is diffraction limited. Cost issues, on the other hand, make slower but higher resolution methods, like ele...

पूर्ण विवरण

ग्रंथसूची विवरण
मुख्य लेखकों:	Hesjedal, T, Seidel, W, Kostial, H
स्वरूप:	Conference item
प्रकाशित:	2002

समान संसाधन

Near-field elastomeric mask photolithography fabrication of high-frequency surface acoustic wave transducers
द्वारा: Hesjedal, T, और अन्य
प्रकाशित: (2003)

Parallel scanning near-field photolithography: the Snomipede
द्वारा: Ul-Haq, Ehtsham, और अन्य
प्रकाशित: (2010)

Near-field sub-diffraction photolithography with an elastomeric photomask
द्वारा: Sangyoon Paik, और अन्य
प्रकाशित: (2020-02-01)

The snomipede : a parallel platform for scanning near-field photolithography.
द्वारा: Ul-Haq, Ehtsham, और अन्य
प्रकाशित: (2011)

AFM observation of surface acoustic waves emitted from single symmetric SAW transducers.
द्वारा: Hesjedal, T, और अन्य
प्रकाशित: (2001)

Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters
द्वारा: Shaolin Zhou, और अन्य
प्रकाशित: (2016-01-01)

Determination of SAW phase velocities on the nanoscale
द्वारा: Hesjedal, T, और अन्य
प्रकाशित: (1996)

Reconfigurable phase-change photomask for grayscale photolithography
द्वारा: Wang, Q., और अन्य
प्रकाशित: (2019)

Investigation of crossed SAW fields by scanning acoustic force microscopy.
द्वारा: Behme, G, और अन्य
प्रकाशित: (2001)

Dual-Element Transducer with Phase-Inversion for Wide Depth of Field in High-Frequency Ultrasound Imaging
द्वारा: Jong Seob Jeong
प्रकाशित: (2014-08-01)

Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators.
द्वारा: Kubat, F, और अन्य
प्रकाशित: (2004)

Simultaneous phase velocity measurement of non-collinear SAWs by scanning acoustic force microscopy
द्वारा: Behme, G, और अन्य
प्रकाशित: (2000)

Polymer brush hypersurface photolithography
द्वारा: Carlos Carbonell, और अन्य
प्रकाशित: (2020-03-01)

Creation and research of the SAW transducer with a single-phase grid and a piezoelectric zinc oxide film
द्वारा: G. Ya. Karapetyan, और अन्य
प्रकाशित: (2022-10-01)

Plasmonic near field transducer of nanocomposite with distributed feedback
द्वारा: Tianxiang Du, और अन्य
प्रकाशित: (2023-02-01)

Localizing nanoscale objects using nanophotonic near-field transducers
द्वारा: Wolterink Tom A. W., और अन्य
प्रकाशित: (2021-03-01)

Surface-acoustic-wave transducers for the extremely-high-frequency range using AlN/SiC(0001)
द्वारा: Takagaki, Y, और अन्य
प्रकाशित: (2004)

Nodal photolithography : lithography via far-field optical nodes in the resist
द्वारा: Winston, Donald, S.M. Massachusetts Institute of Technology
प्रकाशित: (2008)

Initial Design and Quick Analysis of SAW Ultra–Wideband HFM Transducers
द्वारा: A. Janeliauskas, और अन्य
प्रकाशित: (2017-09-01)

SCANNING ACOUSTIC FORCE MICROSCOPE DETECTION OF SAWS
द्वारा: Chilla, E, और अन्य
प्रकाशित: (1994)

Photolithography based achromatic metasurface/metalens
द्वारा: Gan, Shiyu
प्रकाशित: (2023)

Protein encapsulation in polymeric microneedles by photolithography
द्वारा: Kochhar JS, और अन्य
प्रकाशित: (2012-06-01)

Plasmonic near-field transducer for heat-assisted magnetic recording
द्वारा: Zhou Nan, और अन्य
प्रकाशित: (2014-06-01)

Intelligent Photolithography Corrections Using Dimensionality Reductions
द्वारा: Parag Parashar, और अन्य
प्रकाशित: (2019-01-01)

Single Interdigital Transducer Approach for Gravimetrical SAW Sensor Applications in Liquid Environments
द्वारा: Vu Hoa Nguyen, और अन्य
प्रकाशित: (2017-12-01)

Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
द्वारा: Zhang, Jun
प्रकाशित: (2008)

Direct Photolithography of WOx Nanoparticles for High-Resolution Non-Emissive Displays
द्वारा: Chang Gu, और अन्य
प्रकाशित: (2024-11-01)

UV-LED projection photolithography for high-resolution functional photonic components
द्वारा: Lei Zheng, और अन्य
प्रकाशित: (2021-08-01)

Scanning acoustic force microscopy on interdigital transducers
द्वारा: Hesjedal, T, और अन्य
प्रकाशित: (1996)

RIS-assisted near-field localization using practical phase shift model
द्वारा: Saber Hassouna, और अन्य
प्रकाशित: (2024-02-01)

Micro-layered-photolithography for Micro-Fabrication and Micro-Molding
द्वारा: Tang, Y., और अन्य
प्रकाशित: (2004)

Applications and precision studies of positive photoresists in photolithography
द्वारा: Li, Yichen
प्रकाशित: (2025)

Smartphone Display Based Photolithography to Fabricate Microdevices
द्वारा: Neam Heng Lee, और अन्य
प्रकाशित: (2018-01-01)

Multi-level patterning nucleic acid photolithography
द्वारा: Kathrin Hölz, और अन्य
प्रकाशित: (2019-08-01)

Surfing the SAW: Visualizing the oscillation of Au(111) surface atoms
द्वारा: Hesjedal, T, और अन्य
प्रकाशित: (1997)

Multi-frequency and multi-mode GHz surface acoustic wave sensor
द्वारा: Seidel, W, और अन्य
प्रकाशित: (2003)

Evaluation of the dual-frequency transducer for controlling thermal ablation morphology using frequency shift keying signal
द्वारा: Wenchang Huang, और अन्य
प्रकाशित: (2022-12-01)

Novel droplet near-field transducer for heat-assisted magnetic recording
द्वारा: Gosciniak Jacek, और अन्य
प्रकाशित: (2015-12-01)

Phase Noise of SAW Delay Line Magnetic Field Sensors
द्वारा: Phillip Durdaut, और अन्य
प्रकाशित: (2021-08-01)

Standing wave performance test of IDT-SAW transducer prepared by silk-screen printing
द्वारा: Ziping Wang, और अन्य
प्रकाशित: (2018-05-01)