Near-field phase shift photolithography for high-frequency SAW transducers

Near-field phase shift photolithography for high-frequency SAW transducers

Optical lithography has been widely used in mass production of various electronic devices, mainly because of its high throughput capability. However, the resolution in conventional lithography is diffraction limited. Cost issues, on the other hand, make slower but higher resolution methods, like ele...

書誌詳細
主要な著者:	Hesjedal, T, Seidel, W, Kostial, H
フォーマット:	Conference item
出版事項:	2002

類似資料

Near-field elastomeric mask photolithography fabrication of high-frequency surface acoustic wave transducers
著者:: Hesjedal, T, 等
出版事項: (2003)

Parallel scanning near-field photolithography: the Snomipede
著者:: Ul-Haq, Ehtsham, 等
出版事項: (2010)

Near-field sub-diffraction photolithography with an elastomeric photomask
著者:: Sangyoon Paik, 等
出版事項: (2020-02-01)

The snomipede : a parallel platform for scanning near-field photolithography.
著者:: Ul-Haq, Ehtsham, 等
出版事項: (2011)

AFM observation of surface acoustic waves emitted from single symmetric SAW transducers.
著者:: Hesjedal, T, 等
出版事項: (2001)

Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters
著者:: Shaolin Zhou, 等
出版事項: (2016-01-01)

Determination of SAW phase velocities on the nanoscale
著者:: Hesjedal, T, 等
出版事項: (1996)

Reconfigurable phase-change photomask for grayscale photolithography
著者:: Wang, Q., 等
出版事項: (2019)

Investigation of crossed SAW fields by scanning acoustic force microscopy.
著者:: Behme, G, 等
出版事項: (2001)

Dual-Element Transducer with Phase-Inversion for Wide Depth of Field in High-Frequency Ultrasound Imaging
著者:: Jong Seob Jeong
出版事項: (2014-08-01)

Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators.
著者:: Kubat, F, 等
出版事項: (2004)

Simultaneous phase velocity measurement of non-collinear SAWs by scanning acoustic force microscopy
著者:: Behme, G, 等
出版事項: (2000)

Polymer brush hypersurface photolithography
著者:: Carlos Carbonell, 等
出版事項: (2020-03-01)

Creation and research of the SAW transducer with a single-phase grid and a piezoelectric zinc oxide film
著者:: G. Ya. Karapetyan, 等
出版事項: (2022-10-01)

Plasmonic near field transducer of nanocomposite with distributed feedback
著者:: Tianxiang Du, 等
出版事項: (2023-02-01)

Localizing nanoscale objects using nanophotonic near-field transducers
著者:: Wolterink Tom A. W., 等
出版事項: (2021-03-01)

Surface-acoustic-wave transducers for the extremely-high-frequency range using AlN/SiC(0001)
著者:: Takagaki, Y, 等
出版事項: (2004)

Nodal photolithography : lithography via far-field optical nodes in the resist
著者:: Winston, Donald, S.M. Massachusetts Institute of Technology
出版事項: (2008)

Initial Design and Quick Analysis of SAW Ultra–Wideband HFM Transducers
著者:: A. Janeliauskas, 等
出版事項: (2017-09-01)

SCANNING ACOUSTIC FORCE MICROSCOPE DETECTION OF SAWS
著者:: Chilla, E, 等
出版事項: (1994)

Photolithography based achromatic metasurface/metalens
著者:: Gan, Shiyu
出版事項: (2023)

Protein encapsulation in polymeric microneedles by photolithography
著者:: Kochhar JS, 等
出版事項: (2012-06-01)

Plasmonic near-field transducer for heat-assisted magnetic recording
著者:: Zhou Nan, 等
出版事項: (2014-06-01)

Intelligent Photolithography Corrections Using Dimensionality Reductions
著者:: Parag Parashar, 等
出版事項: (2019-01-01)

Single Interdigital Transducer Approach for Gravimetrical SAW Sensor Applications in Liquid Environments
著者:: Vu Hoa Nguyen, 等
出版事項: (2017-12-01)

Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
著者:: Zhang, Jun
出版事項: (2008)

Direct Photolithography of WOx Nanoparticles for High-Resolution Non-Emissive Displays
著者:: Chang Gu, 等
出版事項: (2024-11-01)

UV-LED projection photolithography for high-resolution functional photonic components
著者:: Lei Zheng, 等
出版事項: (2021-08-01)

Scanning acoustic force microscopy on interdigital transducers
著者:: Hesjedal, T, 等
出版事項: (1996)

RIS-assisted near-field localization using practical phase shift model
著者:: Saber Hassouna, 等
出版事項: (2024-02-01)

Micro-layered-photolithography for Micro-Fabrication and Micro-Molding
著者:: Tang, Y., 等
出版事項: (2004)

Applications and precision studies of positive photoresists in photolithography
著者:: Li, Yichen
出版事項: (2025)

Smartphone Display Based Photolithography to Fabricate Microdevices
著者:: Neam Heng Lee, 等
出版事項: (2018-01-01)

Multi-level patterning nucleic acid photolithography
著者:: Kathrin Hölz, 等
出版事項: (2019-08-01)

Surfing the SAW: Visualizing the oscillation of Au(111) surface atoms
著者:: Hesjedal, T, 等
出版事項: (1997)

Multi-frequency and multi-mode GHz surface acoustic wave sensor
著者:: Seidel, W, 等
出版事項: (2003)

Evaluation of the dual-frequency transducer for controlling thermal ablation morphology using frequency shift keying signal
著者:: Wenchang Huang, 等
出版事項: (2022-12-01)

Novel droplet near-field transducer for heat-assisted magnetic recording
著者:: Gosciniak Jacek, 等
出版事項: (2015-12-01)

Phase Noise of SAW Delay Line Magnetic Field Sensors
著者:: Phillip Durdaut, 等
出版事項: (2021-08-01)

Standing wave performance test of IDT-SAW transducer prepared by silk-screen printing
著者:: Ziping Wang, 等
出版事項: (2018-05-01)