Exceptional performance of room temperature sputtered flexible thermoelectric thin film using high target utilization sputtering technique
The High Target Utilisation Sputtering technique (HiTUS) is of interest for industrial processes, including in roll-to-roll manufacturing. This study marks the first application of HiTUS to thermoelectric materials, exemplified by bismuth telluride. The HiTUS technique separates the sputtering power...
| Main Authors: | , , , , , , , , , , , , , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
Wiley
2024
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