A COMPARATIVE-STUDY OF THE ADSORPTION OF HOT-FILAMENT ACTIVATED HYDROCARBONS ON SILICON, GALLIUM-ARSENIDE AND CVD DIAMOND

A COMPARATIVE-STUDY OF THE ADSORPTION OF HOT-FILAMENT ACTIVATED HYDROCARBONS ON SILICON, GALLIUM-ARSENIDE AND CVD DIAMOND

Adsorption studies of hot filament activated methane and methane-hydrogen mixtures on non-diamond and diamond surfaces reveal considerable differences in both the nature of the species formed on the surface and the subsequent surface lifetimes of these forms. In the case of GaAs(100), no evidence is...

Полное описание

Библиографические подробности
Главные авторы:	Chua, L, Jackman, R, Kingsley, C, Foord, J
Формат:	Conference item
Опубликовано:	1994

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