In-situ study of acoustomigration by scanning acoustic force microscopy
High-power operation of surface acoustic wave devices may lead to stress induced material transport, so-called acoustomigration. We used Scanning Acoustic Force Microscopy (SAFM) to study acoustomigration of metal structures in-situ, i.e. during the high-power loading of the device. SAFM allows for...
| Main Authors: | , , , , |
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| Format: | Conference item |
| Published: |
2003
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