In-situ study of acoustomigration by scanning acoustic force microscopy

In-situ study of acoustomigration by scanning acoustic force microscopy

High-power operation of surface acoustic wave devices may lead to stress induced material transport, so-called acoustomigration. We used Scanning Acoustic Force Microscopy (SAFM) to study acoustomigration of metal structures in-situ, i.e. during the high-power loading of the device. SAFM allows for...

书目详细资料
Main Authors:	Hesjedal, T, Kubat, F, Mohanty, J, Ruile, W, Reindl, L
格式:	Conference item
出版:	2003

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