Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates

The structural, mechanical and gas barrier properties of aluminum oxide and indium tin oxide coatings deposited by DC reactive sputtering on poly(ethylene terephthalate) has been investigated. The oxygen and water vapour transmission rates of the films were measured as a function of temperature in o...

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Bibliographic Details
Main Authors: Henry, B, Erlat, A, McGuigan, A, Grovenor, C, Briggs, G, Tsukahara, Y, Miyamoto, T, Noguchi, N, Niijima, T
Format: Journal article
Language:English
Published: 2001