Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)

It is well established that the growth of Ge on Si(001) proceeds by Stranski-Krastanov mode, i.e. 3D islands ("hut" and macroscopic clusters) nucleate on top of a 3-4 ML thick pseudomorphic layer. Here, we present in-situ intrinsic stress measurements of Ge/Si(001) up to the film thickness...

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Prif Awduron: Wedler, G, Walt, J, Hesjedal, T, Chilla, E, Koch, R
Fformat: Journal article
Iaith:English
Cyhoeddwyd: 1998
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author Wedler, G
Walt, J
Hesjedal, T
Chilla, E
Koch, R
author_facet Wedler, G
Walt, J
Hesjedal, T
Chilla, E
Koch, R
author_sort Wedler, G
collection OXFORD
description It is well established that the growth of Ge on Si(001) proceeds by Stranski-Krastanov mode, i.e. 3D islands ("hut" and macroscopic clusters) nucleate on top of a 3-4 ML thick pseudomorphic layer. Here, we present in-situ intrinsic stress measurements of Ge/Si(001) up to the film thicknesses at which the 3D islands percolate. From the film stress - and supported by AFM investigations - three stages of film growth characterised by different reliefs of the misfit strain can be discriminated: (1) the pseudomorphic layer-by-layer stage, (2) nucleation and growth and (3) coalescence of 3D islands. © 1998 Elsevier Science B.V. All rights reserved.
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spelling oxford-uuid:51917fb1-b0af-4284-8c18-1b8a275f53e02022-03-26T16:20:20ZIntrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:51917fb1-b0af-4284-8c18-1b8a275f53e0EnglishSymplectic Elements at Oxford1998Wedler, GWalt, JHesjedal, TChilla, EKoch, RIt is well established that the growth of Ge on Si(001) proceeds by Stranski-Krastanov mode, i.e. 3D islands ("hut" and macroscopic clusters) nucleate on top of a 3-4 ML thick pseudomorphic layer. Here, we present in-situ intrinsic stress measurements of Ge/Si(001) up to the film thicknesses at which the 3D islands percolate. From the film stress - and supported by AFM investigations - three stages of film growth characterised by different reliefs of the misfit strain can be discriminated: (1) the pseudomorphic layer-by-layer stage, (2) nucleation and growth and (3) coalescence of 3D islands. © 1998 Elsevier Science B.V. All rights reserved.
spellingShingle Wedler, G
Walt, J
Hesjedal, T
Chilla, E
Koch, R
Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)
title Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)
title_full Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)
title_fullStr Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)
title_full_unstemmed Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)
title_short Intrinsic stress upon Stranski-Krastanov growth of Ge on Si(001)
title_sort intrinsic stress upon stranski krastanov growth of ge on si 001
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AT waltj intrinsicstressuponstranskikrastanovgrowthofgeonsi001
AT hesjedalt intrinsicstressuponstranskikrastanovgrowthofgeonsi001
AT chillae intrinsicstressuponstranskikrastanovgrowthofgeonsi001
AT kochr intrinsicstressuponstranskikrastanovgrowthofgeonsi001