Accuracy of pulsed laser atom probe tomography for compound semiconductor analysis
Atom probe tomography has recently experienced a renaissance, strongly promoted by the revival of pulsed laser atom probe. The technique is now widely employed to study semiconductor materials at the nanometre level. This paper summarises some aspects of the accuracy of pulsed laser atom probe relev...
| Main Authors: | , , , , |
|---|---|
| Format: | Conference item |
| Published: |
2011
|