The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption
The absolute number density of oxygen atoms in the O(3P 2) state is determined in an inductively coupled plasma chamber using absorption spectroscopy enhanced by a high finesse cavity with a continuous wave diode laser as the radiation source. At a nominal pressure of 100 mTorr of precursor gas O2 a...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2007
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