The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption
The absolute number density of oxygen atoms in the O(3P 2) state is determined in an inductively coupled plasma chamber using absorption spectroscopy enhanced by a high finesse cavity with a continuous wave diode laser as the radiation source. At a nominal pressure of 100 mTorr of precursor gas O2 a...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
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2007
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| _version_ | 1797069084737667072 |
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| author | Hancock, G Peverall, R Ritchie, G Thornton, L |
| author_facet | Hancock, G Peverall, R Ritchie, G Thornton, L |
| author_sort | Hancock, G |
| collection | OXFORD |
| description | The absolute number density of oxygen atoms in the O(3P 2) state is determined in an inductively coupled plasma chamber using absorption spectroscopy enhanced by a high finesse cavity with a continuous wave diode laser as the radiation source. At a nominal pressure of 100 mTorr of precursor gas O2 and 500 W plasma power the O(3P 2) concentration is found to be (4.8 0.6) × 1014 cm-3. © 2007 IOP Publishing Ltd. |
| first_indexed | 2024-03-06T22:19:20Z |
| format | Journal article |
| id | oxford-uuid:547d18ed-7fd1-477a-8f83-562af3ad67b4 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T22:19:20Z |
| publishDate | 2007 |
| record_format | dspace |
| spelling | oxford-uuid:547d18ed-7fd1-477a-8f83-562af3ad67b42022-03-26T16:38:09ZThe number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorptionJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:547d18ed-7fd1-477a-8f83-562af3ad67b4EnglishSymplectic Elements at Oxford2007Hancock, GPeverall, RRitchie, GThornton, LThe absolute number density of oxygen atoms in the O(3P 2) state is determined in an inductively coupled plasma chamber using absorption spectroscopy enhanced by a high finesse cavity with a continuous wave diode laser as the radiation source. At a nominal pressure of 100 mTorr of precursor gas O2 and 500 W plasma power the O(3P 2) concentration is found to be (4.8 0.6) × 1014 cm-3. © 2007 IOP Publishing Ltd. |
| spellingShingle | Hancock, G Peverall, R Ritchie, G Thornton, L The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption |
| title | The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption |
| title_full | The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption |
| title_fullStr | The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption |
| title_full_unstemmed | The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption |
| title_short | The number density of ground state atomic oxygen (O(P-3(2))) measured in an inductively coupled plasma chamber by cavity enhanced absorption |
| title_sort | number density of ground state atomic oxygen o p 3 2 measured in an inductively coupled plasma chamber by cavity enhanced absorption |
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