Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

Diamond growth was carried out using various kinds of substrates and substrate holders in conventional microwave plasma-enhanced chemical vapor deposition with a mixture of CH4 and H2, and the quality and electrical properties of the diamond films were investigated. The surface morphology and proper...

Полное описание

Библиографические подробности
Главные авторы:	Hiramatsu, M, Lau, C, Bennett, A, Foord, J
Формат:	Conference item
Опубликовано:	2002

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