Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

Diamond growth was carried out using various kinds of substrates and substrate holders in conventional microwave plasma-enhanced chemical vapor deposition with a mixture of CH4 and H2, and the quality and electrical properties of the diamond films were investigated. The surface morphology and proper...

Bibliográfalaš dieđut
Váldodahkkit:	Hiramatsu, M, Lau, C, Bennett, A, Foord, J
Materiálatiipa:	Conference item
Almmustuhtton:	2002

Geahča maid

Measurement of C-2 radical density in microwave methane/hydrogen plasma used for nanocrystalline diamond film formation
Dahkki: Hiramatsu, M, et al.
Almmustuhtton: (2003)

Deposition of highly oriented diamond films by microwave plasma enhanced CVD
Dahkki: Liao, Xiao Ning.
Almmustuhtton: (2010)

The effect of hydrogen on the electronic properties of CVD diamond films
Dahkki: Looi, H, et al.
Almmustuhtton: (1999)

Electrochemically controlled modification of CVD diamond surfaces
Dahkki: Foord, J, et al.
Almmustuhtton: (2004)

Deposition of diamond films by microwave plasma CVD on 4H-SiC substrates
Dahkki: Shasha Wei, et al.
Almmustuhtton: (2023-01-01)

CVD diamond with boron-doped delta-layers deposited by microwave plasma
Dahkki: Vikharev A.L., et al.
Almmustuhtton: (2017-01-01)

Growth of nanocrystalline diamond films for low field electron emission
Dahkki: Proffitt, S, et al.
Almmustuhtton: (1999)

A ROUTE FOR THE FORMATION OF CH2 SPECIES DURING DIAMOND CVD
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Almmustuhtton: (1995)

THE GROWTH OF NUCLEATION LAYERS FOR HIGH-QUALITY DIAMOND CVD FROM AN RF PLASMA
Dahkki: Jackman, R, et al.
Almmustuhtton: (1995)

Inhomogeneities across boron-doped nanocrystalline diamond films
Dahkki: J.J. Bennett, et al.
Almmustuhtton: (2024-06-01)

CAPACITIVELY COUPLED RF PLASMA SOURCES - A VIABLE APPROACH FOR CVD DIAMOND GROWTH
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Almmustuhtton: (1994)

Interaction of organo-sulfur compounds with CVD diamond surfaces
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Almmustuhtton: (2000)

Influence of material properties on the performance of diamond photocathodes
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Almmustuhtton: (2002)

Deep level transient spectroscopy of CVD diamond: the observation of defect states in hydrogenated films
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Almmustuhtton: (2001)

Multiplex H-2 CARS thermometry in a microwave assisted diamond CVD plasma
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Almmustuhtton: (1997)

Sonoelectrochemistry at tungsten-supported boron-doped CVD diamond electrodes
Dahkki: Goeting, C, et al.
Almmustuhtton: (1999)

Electrochemical deposition of nanocrystalline zinc oxide at conductive diamond electrodes
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Almmustuhtton: (2006)

Spectroscopic Ellipsometry of Nanocrystalline Diamond Film Growth
Dahkki: Evan L. H. Thomas, et al.
Almmustuhtton: (2017-10-01)

Characterizations of microwave plasma CVD grown polycrystalline diamond coatings for advanced technological applications
Dahkki: Awadesh Kumar Mallik, et al.
Almmustuhtton: (2014-06-01)

Growth of CVD diamond films for the development of radiation detectors
Dahkki: Gan, Bo
Almmustuhtton: (2008)

Development of diamond-like carbon films by ECR-CVD
Dahkki: Yang, Hong
Almmustuhtton: (2009)

Laser planarization efficiency and roughness of CVD diamond film
Dahkki: Shiyu LI, et al.
Almmustuhtton: (2022-02-01)

Analysis of a Thermal Plasma Diamond CVD System
Dahkki: D. Kolman
Almmustuhtton: (2001-01-01)

Understanding the chemistry of low temperature diamond growth: an investigation into the interaction of chlorine and atomic hydrogen at CVD diamond surfaces
Dahkki: Proffitt, S, et al.
Almmustuhtton: (2000)

Reactive chemistry of C(2)H(x) species on CVD diamond
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Almmustuhtton: (1998)

Boron Doped Nanocrystalline Diamond Films for Biosensing Applications
Dahkki: V. Petrák, et al.
Almmustuhtton: (2011-01-01)

Influence of microwave plasma parameters on light emission from SiV color centers in nanocrystalline diamond films
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Almmustuhtton: (2014-11-01)

Paramagnetic defects in CVD diamonds
Dahkki: Talbot-Ponsonby, D, et al.
Almmustuhtton: (1997)

Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study
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Almmustuhtton: (2023-12-01)

Tuning the electron affinity of CVD diamond with adsorbed caesium and oxygen layers
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Almmustuhtton: (1997)

Systematic research on the performance of self-designed microwave plasma reactor for CVD high quality diamond
Dahkki: Xiao-Jing Li, et al.
Almmustuhtton: (2018-10-01)

Antibacterial mechanisms of nanocrystalline diamond film and graphene sheet
Dahkki: Hong Gi Oh, et al.
Almmustuhtton: (2019-03-01)

Surface studies of the reactivity of methyl, acetylene and atomic hydrogen at CVD diamond surfaces
Dahkki: Foord, J, et al.
Almmustuhtton: (1998)

CVD diamond for electronic devices and sensors /
Dahkki: Sussmann, Ricardo S.
Almmustuhtton: (2009)

Transmissive diamond photocathodes
Dahkki: Foord, J, et al.
Almmustuhtton: (2005)

Waveguides Written by Femtosecond Laser in CVD Diamonds
Dahkki: Perevoznik D., et al.
Almmustuhtton: (2024-01-01)

Silicon-Vacancy Centers in Ultra-Thin Nanocrystalline Diamond Films
Dahkki: Stepan Stehlik, et al.
Almmustuhtton: (2018-06-01)

Review: Plasma-enhanced chemical vapor deposition of nanocrystalline diamond
Dahkki: Katsuyuki Okada
Almmustuhtton: (2007-01-01)

Studies of molybdenum surface modification for growth of adherent CVD diamond film
Dahkki: Vladimir Jesus Trava-Airoldi, et al.
Almmustuhtton: (2003-06-01)

Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge
Dahkki: J. V. Silva Neto, et al.
Almmustuhtton: (2022-09-01)