$Cross-correlation based high resolution electron backscatter diffraction and electron channelling contrast imaging for strain mapping and dislocation distributions in InAlN thin films$

Cross-correlation based high resolution electron backscatter diffraction and electron channelling contrast imaging for strain mapping and dislocation distributions in InAlN thin films

We describe the development of cross-correlation based high resolution electron backscatter diffraction (HR-EBSD) and electron channelling contrast imaging (ECCI), in the scanning electron microscope (SEM), to quantitatively map the strain variation and lattice rotation and determine the density and...

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Bibliographic Details
Main Authors:	Wilkinson, A, Vilalta-Clemente, A, Naresh-Kumar, G, Nouf-Allehiani, M, Gamarra, P, di Forte-Poisson, M, Trager-Cowan, C
Format:	Journal article
Published:	Elsevier 2016

Cross-correlation based high resolution electron backscatter diffraction and electron channelling contrast imaging for strain mapping and dislocation distributions in InAlN thin films

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