A study of (111) oriented epitaxial thin films of In2O3 on cubic Y-doped ZrO2 by synchrotron-based x-ray diffraction
Reciprocal space mapping using synchrotron-based X-ray diffraction has been used to study the effects of strain and strain relaxation in (111) oriented thin films of In2O3 on cubic Y-stabilized ZrO 2 over a range of epilayer thicknesses between 35 and 420 nm. Maps around the...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2012
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