Structural characterisation of CNx thin films deposited by pulsed laser ablation
Carbon nitride (CNx) film growth by 193 nm pulsed laser ablation of graphite in a low pressure of N2 has been investigated both by studying optical emission from the plume and by analyses of the composition, structure and bonding of material deposited at a range of substrate temperatures. Spectral a...
| Autores principales: | , , , , |
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| Formato: | Journal article |
| Lenguaje: | English |
| Publicado: |
2003
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