Computer-guided alignment I : Phase and amplitude modulation of alignment-influenced optical wavefront.

As the first part of a development programme on computer-guided alignment (CGA), we model the alignment influence on the optical wavefront in terms of the phase and amplitude modulation. This modulation is derived from the interaction between alignment parameters and influence functions, both expres...

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Bibliografiska uppgifter
Huvudupphovsmän: Lee, H, Dalton, G, Tosh, I, Kim, S
Materialtyp: Journal article
Språk:English
Publicerad: Optical Society of American (OSA) 2007