Progress in aberration-corrected scanning transmission electron microscopy.
A new corrector of spherical aberration (C(S)) for a dedicated scanning transmission electron microscope (STEM) is described and its results are presented. The corrector uses strong octupoles and increases C(C) by only 0.2 mm relative to the uncorrected microscope. Its overall stability is greatly i...
Main Authors: | , , , , |
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Format: | Journal article |
Language: | English |
Published: |
2001
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