Monte Carlo simulation of growth of porous SiOx by vapor deposition.
A random network model containing defects has been developed and applied to the deposition of amorphous SiOx films on a flat substrate. A new Monte Carlo procedure enables dangling bonds to migrate and annihilate. The degree of porosity in the films is found to increase with oxygen content. As the o...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2001
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