Fabrication of Li1+xAlxGe2-x(PO4)3 thin films by sputtering for solid electrolytes
Li1+xAlxGe2-x(PO4)3 (LAGP) thin films have been grown on sapphire substrates by RF magnetron sputtering and post annealing. The effects of varying sputtering parameters such as power and pressure were studied, and the deposited films were characterized to investigate how the ionic conductivity value...
| Main Authors: | , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
Elsevier
2020
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