The role of prismatic dislocation loops in the generation of glide dislocations in Cz-silicon
The aim of this work is to understand the mechanisms that lead to warpage of Czochralski silicon wafers. We propose that under sufficiently large stresses, the prismatic loops which are punched-out from oxide precipitates during precipitation can initially grow as long dipoles until they cross-slip....
| Main Authors: | , , , |
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| Format: | Conference item |
| Published: |
2004
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