Fabrication and quality factor control of a microelectromechanical system resonator with linear differential drive
The fabrication, characterisation and quality factor control of a microelectromechanical system resonator with differential drive and readout is reported. The differential drive results in a linear relationship between the AC drive voltage and the applied force. Furthermore, the static DC force and...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2010
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