Fabrication of multilayer molds by dry film photoresist
Dry film photoresists are widely employed to fabricate high-aspect-ratio microstructures, such as molds for microfluidic devices. Unlike liquid resists, such as SU-8, dry films do not require a cleanroom facility, and it is straightforward to prepare uniform and reproducible films as thick as 500 µm...
| Main Authors: | , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
MDPI
2022
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