Characterization of oxide gas barrier films

The aim of this study was to investigate the microstructure and the gas barrier performance of AlOx layers of varying thickness (23 to 34nm), deposited by magnetron sputtering on polyethylene terephthalate substrates. The gas barrier properties of the films were found to be good, as expected for the...

Ful tanımlama

Detaylı Bibliyografya
Asıl Yazarlar: Henry, B, Dinelli, F, Zhao, K, Erlat, A, Grovenor, C, Briggs, G, Kumar, R, Howson, R
Materyal Türü: Journal article
Dil:English
Baskı/Yayın Bilgisi: Society of Vacuum Coaters 1999