Characterization of oxide gas barrier films
The aim of this study was to investigate the microstructure and the gas barrier performance of AlOx layers of varying thickness (23 to 34nm), deposited by magnetron sputtering on polyethylene terephthalate substrates. The gas barrier properties of the films were found to be good, as expected for the...
| Main Authors: | , , , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
Society of Vacuum Coaters
1999
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