Surface studies of the interaction of Cl2 with InP(100)(4 × 2); an investigation of adsorption, thermal etching and ion beam assisted processes
The reactions of chlorine on the InP(100)(4 × 2) surface have been investigated using LEED, AES and TDS techniques. Chlorine forms a strongly bound chemisorbed monolayer on the semiconductor surface during low gas exposures. At high gas exposures, bulk corrosion sets in and an In-rich chloride film...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1990
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