Understanding and optimising EBIC pn-junction characterisation from modelling insights
In this paper, the physical mechanisms involved in electron beam induced current (EBIC) imaging of semiconductor pn-junctions are reviewed to propose a model and optimise the acquisition of experimental data. Insights are drawn on the dependence of the EBIC signal with electron accelerating voltage...
| Main Authors: | , , , , , , , , , |
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| Format: | Journal article |
| Published: |
AIP Publishing
2020
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