Out-diffusion of nitrogen from float-zone silicon measured by dislocation locking

A measurement of nitrogen out-diffusion from nitrogen-doped float-zone silicon made using a dislocation locking technique is presented. Specimens containing a well-defined array of dislocation half-loops are subjected to identical anneals at 750°C, during which nitrogen diffuses both to the surface...

Ausführliche Beschreibung

Bibliographische Detailangaben
Hauptverfasser: Alpass, C, Murphy, J, Giannattasio, A, Senkader, S, Falster, R, Wilshaw, P
Format: Journal article
Sprache:English
Veröffentlicht: 2007