Classical-trajectory calculations on Ar+ sputtering of a Si(001) surface using an ab initio potential.
We describe classical-trajectory calculations of sputtering yields for Ar+-ion collisions with a Si(001) surface. The Ar+-Si and short-ranged Si-Si interaction potentials were calculated using the ab initio Hartree-Fock and configuration-interaction methods. The low-energy potential describing the s...
| Main Authors: | , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1989
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