Towards sub-0.5 angstrom beams through aberration corrected STEM
Correction of spherical aberration (C-S) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spect...
| Main Authors: | , , , , , , |
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| Format: | Conference item |
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2004
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