Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition
Studies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the...
| Main Authors: | , , , , , |
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| Format: | Conference item |
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2001
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| _version_ | 1826278235538718720 |
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| author | Smith, J Rosser, K Yagi, H Wallace, M May, P Ashfold, M |
| author_facet | Smith, J Rosser, K Yagi, H Wallace, M May, P Ashfold, M |
| author_sort | Smith, J |
| collection | OXFORD |
| description | Studies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the plasma. Species selective, spatially resolved optical emission measurements have enabled derivation of the longitudinal and lateral variation of emitting C2, CN radicals and H (n = 3) atoms within the plasma jet. Scanning electron microscopy and laser Raman analyses indicate that N2 additions also degrade both the growth rate and quality of the deposited diamond film; the latter technique also provides some evidence for nitrogen inclusion within the films. © 2001 Elsevier Science B.V. All rights reserved. |
| first_indexed | 2024-03-06T23:40:55Z |
| format | Conference item |
| id | oxford-uuid:6f492d5a-2981-409f-9a5e-75a0417dd2a3 |
| institution | University of Oxford |
| last_indexed | 2024-03-06T23:40:55Z |
| publishDate | 2001 |
| record_format | dspace |
| spelling | oxford-uuid:6f492d5a-2981-409f-9a5e-75a0417dd2a32022-03-26T19:29:43ZDiamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen additionConference itemhttp://purl.org/coar/resource_type/c_5794uuid:6f492d5a-2981-409f-9a5e-75a0417dd2a3Symplectic Elements at Oxford2001Smith, JRosser, KYagi, HWallace, MMay, PAshfold, MStudies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the plasma. Species selective, spatially resolved optical emission measurements have enabled derivation of the longitudinal and lateral variation of emitting C2, CN radicals and H (n = 3) atoms within the plasma jet. Scanning electron microscopy and laser Raman analyses indicate that N2 additions also degrade both the growth rate and quality of the deposited diamond film; the latter technique also provides some evidence for nitrogen inclusion within the films. © 2001 Elsevier Science B.V. All rights reserved. |
| spellingShingle | Smith, J Rosser, K Yagi, H Wallace, M May, P Ashfold, M Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition |
| title | Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition |
| title_full | Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition |
| title_fullStr | Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition |
| title_full_unstemmed | Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition |
| title_short | Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition |
| title_sort | diamond deposition in a dc arc jet cvd system investigations of the effects of nitrogen addition |
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