Diamond deposition in a DC-arc Jet CVD system: investigations of the effects of nitrogen addition
Studies of the chemical vapour deposition of diamond films at growth rates > 100 μm h-1 with a 10-kW DC-arc jet system are described. Additions of small amounts of N2 to the standard CH4/H2/Ar feedstock gas results in strong CN(B → X) emission, and quenches C2(d → a) and Hα emissions from the...
| Główni autorzy: | , , , , , |
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| Format: | Conference item |
| Wydane: |
2001
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