Switch on, switch off: stiction in nanoelectromechanical switches
We present a theoretical investigation of stiction in nanoscale electromechanical contact switches. We develop a mathematical model to describe the deflection of a cantilever beam in response to both electrostatic and van der Waals forces. Particular focus is given to the question of whether adhesiv...
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| פורמט: | Journal article |
| יצא לאור: |
2013
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