REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100)
| Huvudupphovsmän: | , , |
|---|---|
| Materialtyp: | Journal article |
| Publicerad: |
1986
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| _version_ | 1826278996340375552 |
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| author | Jackman, R Ebert, H Foord, J |
| author_facet | Jackman, R Ebert, H Foord, J |
| author_sort | Jackman, R |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-06T23:52:15Z |
| format | Journal article |
| id | oxford-uuid:72ffcb67-e45a-49b5-b8cf-af70ebc1275d |
| institution | University of Oxford |
| last_indexed | 2024-03-06T23:52:15Z |
| publishDate | 1986 |
| record_format | dspace |
| spelling | oxford-uuid:72ffcb67-e45a-49b5-b8cf-af70ebc1275d2022-03-26T19:53:40ZREACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100)Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:72ffcb67-e45a-49b5-b8cf-af70ebc1275dSymplectic Elements at Oxford1986Jackman, REbert, HFoord, J |
| spellingShingle | Jackman, R Ebert, H Foord, J REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100) |
| title | REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100) |
| title_full | REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100) |
| title_fullStr | REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100) |
| title_full_unstemmed | REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100) |
| title_short | REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100) |
| title_sort | reaction mechanisms for the photon enhanced etching of semiconductors an investigation of the uv stimulated interaction of chlorine with si 100 |
| work_keys_str_mv | AT jackmanr reactionmechanismsforthephotonenhancedetchingofsemiconductorsaninvestigationoftheuvstimulatedinteractionofchlorinewithsi100 AT eberth reactionmechanismsforthephotonenhancedetchingofsemiconductorsaninvestigationoftheuvstimulatedinteractionofchlorinewithsi100 AT foordj reactionmechanismsforthephotonenhancedetchingofsemiconductorsaninvestigationoftheuvstimulatedinteractionofchlorinewithsi100 |