Simulation of growth of porous SiOx nanostructures
Monte Carlo simulation of deposition of non-stoichiometric amorphous SiOx nanolayers from vapour phase. onto a polymer surface is reported. The model developed is based on the network properties of silica and takes into account dangling bonds arising during the real process of deposition. The model...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2002
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