Infiltration and inversion of holographically defined polymer photonic crystal templates by atomic layer deposition
A range of techniques employed for 3D optical lithography including atomic layer deposition (ALD) and holographic lithography has been demonstrated. A 3D photonic crystal structure can be written by holographic lithography which makes use of a periodic interference pattern generated by a multiple-be...
| Main Authors: | , , , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2006
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