Spatially resolved optical emission spectroscopy of the secondary glow observed during biasing of a microwave plasma
A secondary glow region is commonly observed between the main plasma ball and the substrate during biased enhanced nucleation (BEN) of diamond films grown using the process of microwave plasma-enhanced chemical vapour deposition. Under conditions of very careful optimization BEN can allow (1 0 0) or...
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| Формат: | Conference item |
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Elsevier
2000
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