Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Sonraí bibleagrafaíochta
Príomhchruthaitheoirí: Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A
Formáid: Journal article
Foilsithe / Cruthaithe: 2012