Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
| Main Authors: | , , , , , , , |
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| Format: | Journal article |
| Published: |
2012
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| _version_ | 1826282401606664192 |
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| author | Song, X Yeap, K Zhu, J Belnoue, J Sebastiani, M Bemporad, E Zeng, K Korsunsky, A |
| author_facet | Song, X Yeap, K Zhu, J Belnoue, J Sebastiani, M Bemporad, E Zeng, K Korsunsky, A |
| author_sort | Song, X |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-07T00:43:18Z |
| format | Journal article |
| id | oxford-uuid:83cb25e3-7fd8-47b7-8fe8-3b641caaa6c5 |
| institution | University of Oxford |
| last_indexed | 2024-03-07T00:43:18Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | oxford-uuid:83cb25e3-7fd8-47b7-8fe8-3b641caaa6c52022-03-26T21:46:36ZResidual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imagingJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:83cb25e3-7fd8-47b7-8fe8-3b641caaa6c5Symplectic Elements at Oxford2012Song, XYeap, KZhu, JBelnoue, JSebastiani, MBemporad, EZeng, KKorsunsky, A |
| spellingShingle | Song, X Yeap, K Zhu, J Belnoue, J Sebastiani, M Bemporad, E Zeng, K Korsunsky, A Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging |
| title | Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging |
| title_full | Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging |
| title_fullStr | Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging |
| title_full_unstemmed | Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging |
| title_short | Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging |
| title_sort | residual stress measurement in thin films at sub micron scale using focused ion beam milling and imaging |
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