Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

ग्रंथसूची विवरण
मुख्य लेखकों: Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A
स्वरूप: Journal article
प्रकाशित: 2012