Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

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书目详细资料
Main Authors:	Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A
格式:	Journal article
出版:	2012

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