Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
Κύριοι συγγραφείς: | Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A |
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Μορφή: | Journal article |
Έκδοση: |
2012
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Παρόμοια τεκμήρια
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Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
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