Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Xehetasun bibliografikoak
Egile Nagusiak: Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A
Formatua: Journal article
Argitaratua: 2012